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M.P. Bruijn et al. (SRON National Inst. for Space Research) Design and Fabrication of Micromachined X-ray Sensors for Space Applications (PDF: 593.2 KB)
E.J. Connolly et al. (Delft University of Technology) A new ammonia sensor (PDF: 214.5 KB)
J.F. Creemer et al. (Delft University of Technology) Titanium Nitride for MEMS Hotplates (PDF: 1 MB)
V.A. Henneken et al. (Delft University of Technology) In-package MST-based actuators for micro-assembly (PDF: 267.6 KB)
A. K. Karilainen et al. (Hamburg University of Technology) Passive, Wireless ECG-Sensor Based on Impedance Loaded SAW-Transponders (PDF: 2 MB)
A.A. Kuijpers (University of Twente) Measurements for an integrated incremental capacitive position sensor for microactuators (PDF: 406.6 KB)
V.G. Kutchoukov et al. (Delft University of Technology / EI lab) Nanofluidic devices in glass with poly-Si electrodes (PDF: 313.7 KB)
L.S. Pakula et al. (Delft University of Technology) CMOS Compatible Pressure sensors: a comparison between SiC and SiN (PDF: 229.4 KB)
G. Pandraud et al. (Delft University of Technology) SiC Micromachined Mach-Zehnder interferometer on Silicon for pressure sensor (PDF: 242.4 KB)
P.B. Turmezei et al. (Delft University of Technology) Motion of biological cells in microfluidic devices (PDF: 122.6 KB)
T.U. Uelzen et al. (Hamburg University of Technology) Safe Visualisation and Localisation of MR-Catheters for MR-guided intravascular interventions using an Optically detunable Resonant Marker in Micro System Technology (PDF: 715.4 KB)
H.B. Wicaksono et al. (Delft University of Technology) Early stages fabrication and optical characterisation of new micromachined silicon strain-sensing structures inspired from the campaniform sensillum of insects (PDF: 395.4 KB)
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