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Proceedings SAFE 2007

  • Sensors and Actuators
  • Devices and Materials
  • Processing Technology
Sensors and Actuators

S.R.A. Chaeron et al. (Delft University of Technology, Erasmus MC)
An optical sensor-system for early bacteria detection in drain fluids

S.M. Chakkalakkal Abdulla et al. (University of Twente)
Bimorph based Active Joints for Nanometre scale Actuation

Y. Chen et al. (Delft University of Technology)
Modelling, Design, and Fabrication of a Bio-inspired MEMS Vibratory Gyroscope

M. Duemling et al. (Hamburg University of Technology, Philips Research, NXP Semiconductors Hamburg)
A RF-Resonator Packaged in Vacuum Using Substrate Transfer and Thin film processes

A.W. Groenland et al. (University of Twente)
Simulation of a Nanolink Hot-Plate Device

N. Izadi et al. (University of Twente)
Optimization of Biomimetic Hair Sensors

R.K. Jaganatharaja et al. (University of Twente)
Adaptive, Cricket-Inspired Artificial Hair Sensor Arrays

J.G. Kaptein et al. (Delft University of Technology, Erasmus MC)
Inductive Powered Implant for Monitoring and Application of Telemetric Metronomic Photodynamic Therapy

W.J. Kuipers et al. (Hamburg University of Technology)
Planar Micro Flame Ionization Detector

J. Lu et al. (University of Twente)
Modeling of an Integrated Electromagnetic Generator for Energy Scavenging

M. Mihailovic et al. (Delft University of Technology)
Monocrystalline Si-based microhotplate heater

V.R.S.S. Mokkapati et al. (Delft University of Technology)
Lab-on-a-chip device for single cell analysis

V. Rajaraman et al. (Delft University of Technology)
SOG Fabrication of Bulk Micromachined and Bonded Capacitive Inertial Sensor Structures

H. Sadeghian et al. (Delft University of Technology)
Adsorption-induced Resonance frequency Change in submicron structures

J. Wei et al. (Delft University of Technology)
Tuning of DRIE process for Capacitive Sensor in Inkjet Nozzle

C.K. Yang et al. (Delft University of Technology, University of Twente)
Field Emission for Cantilever Sensing


Devices and Materials

T. Alan et al. (Delft University of Technology)
A comparative study of the strength of Si, SiN and SiC used at nanoscales

A. Baiano et al. (Delft University of Technology, Seiko-Epson Japan)
SPICE Modeling of Single-Grain Si TFTs using BSIMSOI

A. Boogaard et al. (University of Twente)
Optical and Electrical Characterization of SiO2 films deposited at low temperature by means of remote ICPECVD

Y. Civale et al. (Delft University of Technology)
Electrical Characterization of Layer-Exchange Solid-Phase Epitaxy Si Diode Junctions

Z.S. Houweling et al. (Utrecht University)
Dielectric properties of Hot Wire CVD silicon nitride applied in a-Si TFTs

K. Jarolimek et al. (Radboud University Nijmegen)
Ab initio simulations of hydrogenated amorphoussilicon

V. Jovanovic et al. (Delft University of Technology)
Integration of Junction FETs in Back-wafer Contacted Silicon-On-Glass Technology

L. La Spina et al. (Delft University of Technology)
Aluminium Nitride Layers: One Way to Beat the Heat in Silicon-On-Glass Technology

D. Liebig et al. (Hamburg University of Technology)
First Principle Cellular Automata Simulation of Transport in Short Channel MOS-FET for Self-Consistent Atomistic Modeling of Degradation in Ultra Thin Silicon-Dioxide Dielectrics

S.L. Luxembourg et al. (Delft University of Technology)
Bandgap engineering using a-Si:H/a-SixNy:H superlattices

N. Matsuki et al. (Delft University of Technology, Seiko-Epson Japan)
Modeling and Scanning Probe Microscopy on Local Electrical Properties of Coincidence Site Lattice Boundaries in Location-Controlled Silicon Islands

G. Piccolo et al. (Delft University of Technology)
Low-Frequency Noise Characterization of Ultra-shallow Gate N-channel Junction Field Effect Transistors

S. Put et al. (IMEC, KU Leuven, SCK?CEN, KH Kempen, University of Brussels)
In-situ recovery of the base current of SiGe NPN HBTs at high gamma dose levels

B. Rajasekharan et al. (University of Twente)
Dimensional scaling effects on transport properties of silicon p-i-n diodes

J.L. van der Steen et al. (University of Twente, NXP Semiconductors)
Band Offset Measurements on Ultra-Thin (100) SOI MOSFETs

M.P.J. Tiggelman et al. (University of Twente, NXP Research, Philips Research)
Separation of intrinsic dielectric and resistive electrode losses in ferroelectric capacitors at radio frequencies

V. Verlaan et al. (University of Utrecht, ECN Solar Energy)
Rapidly Deposited Hot-wire CVD Silicon Nitride as Passivating Antireflection Coating on Solar Cells

B. Vet et al. (Delft University of Technology)
Analytical evaluation of the efficiency and open circuit voltage limit in a-Si:H based solar cells

F. Wessely et al. (Darmstadt University of Technology)
Mix-and-match Lithography Based Ultrathin- body SOI Nanowires and Schottky-S/D-FETs

D.H.B. Wicaksono et al. (Delft University of Technology, Ecole Polytechnique Fédérale de Lausanne)
Optical Absorptivity and Thermal Property of LPCVD-Deposited Low-Stress Si-Rich Nitride Membrane for Far-Infrared Sensor

F. Zaunert et al. (Darmstadt University of Technology)
Device and Stress Simulation of MOSFETs with Crystalline High-k Gate-Dielectrics Manufactured with Replacement Gate Process



Processing Technology

R. Bakker et al. (Utrecht University)
Low-Stress Silicon Nitride Deposited at Low Substrate Temperature using Hot-Wire CVD

M. Bargallo Gonzalez et al. (IMEC, KU Leuven, ASM Belgium, ASM America, Texas Instruments)
Impact of the Ge Content and the Epitaxial Thickness on the Bandgap Shrinkage Induced Leakage Current of Recessed Si1-xGex Source/Drain Junctions

V.M. Blanco Carballo et al. (University of Twente, NIKHEF)
Technological aspects of gaseous pixel detectors fabrication

I. Brunets et al. (University of Twente)
Low-Temperature Process Steps for Realization of Non-Volatile Memory Devices

M. Cannavo et al. (Delft University of Technology)
Oxide to oxide wafer bonding for three dimensional (3D) IC integration technologies

G. Elzakker et al. (Delft University of Technology)
Influence of Deposition Pressure on Protocrystalline Silicon Films as Solar Cell Absorber Layer

V. Gonda et a.. (Delft University of Technology)
Double Laser Annealing of Implanted Silicon by using Laser Pulse Offsets

R. Jimenez Zambrano et al. (Delft University of Technology, Eindhoven University of Technology)
Influence of Externally Applied Bias and Atomic Hydrogen Formation on the Properties of Nanocrystaline Silicon Deposited by Expanding Thermal Plasma Chemical Vapor Deposition

G. Lorito et al. (Delft University of Technology)
Analysis of Si-Ti and Si-TiN interface after 400°C alloying

J. Melai et al. (University of Twente, Panalytical X-Ray Tubes)
Considerations on using SU-8 as a construction material for high aspect ratio structures

H.T.M. Pham et al. (Delft University of Technology)
Roughness Treatment of Silicon Surface After Deep Reactive Ion Etching

M. Popadic et al. (Delft University of Technology)
Silicon Dioxide Contact Window Disfiguration Due to Oxide Decomposition During the Baking Step

M. Saadaoui (Delft University of Technology)
Improvement of wettability of silicon nitride in PECVD environment for copper electrodeposition in HAR vias

F. Sarubbi et al. (Delft University of Technology)
Study of Boron-Doped nm-Deep Junctions Fabricated by B2H6 Surface Reaction Doping

N. Stavitski et al. (University of Twente, Philips Research, Delft University of Technology, NXP Research)Cross-Bridge Kelvin Resistor (CBKR) Structures for Measurement of Low Contact Resistances

F. Wali et al. (University of Twente, NXP Semiconductors)
Statistical relation between particle contaminations in ultra pure water and defects generated by process tools

M.A. Wank et al. (Delft University of Technology, Eindhoven University of Technology)
In-situ study by Spectroscopic Ellipsometry of ETP-CVD a-Si:H



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