Goals of this programme
"The ambition of the TFN programme is to establish a knowledge platform in The Netherlands with a high standard of research and in which several aspects of thin film manufacturing (deposition tools and hardware, thin film diagnostic studies, manufacturing and application) are combined in a multidisciplinary approach.
The platform is to provide solutions for current and emerging challenges within thin film manufacturing and to accelerate future developments.
In addition, the platform will facilitate an assessment of the strength and weaknesses of the thin film science and technology in the Netherlands such that opportunities for Dutch technology can be allocated and fully exploited.
Programme committee
| Prof.dr.ir. Richard van de Sanden (Chair) |
TU/e |
| Dr.ir. Erwin Kessels |
TU/e |
| Prof.dr. Jurriaan Schmitz |
UT |
| Prof.dr. Fred Roozeboom |
NXP Semiconductor |
| Ir. Bas van Nooten |
ASM Europe |
| Dr.ing. Yvette Roman (STW co-ordinator) |
STW |
TFN projects
| Dr.ir. W.M.M. Kessels |
TU/e |
10018 |
Atomic layer deposition as an enabling ultrathin film technology |
| Prof.dr. L.K. Nanver |
TUD |
10024 |
Compound-semiconductor element CVD thim-film layers for EUV silicon detectors |
| Prof.dr. F. Bijkerk |
FOM Rijnhuizen |
10025 |
Multilayer optics for lithography beyond the Extreme Ultraviolet wavelength range |
| Dr.ir. L. Abelmann |
UT |
10013 |
Ataktos - The origins of switching field distribution in patterned magnetic multilayered media |
| Dr. A.Y. Kovalgin |
UT |
10017 |
Conductivity Control in Metallic Nanolayers |
| Prof.dr. D.H.A. Blank |
UT |
07711 |
Sub-micron thin doped barium titanate films for MLCC technology |
| Prof.dr. P.H.L. Notten |
TU/e |
07796 |
Second Generation of Integrated Batteries |
| Dr.ir. R. van de Krol |
TUD |
10016 |
Fluidized Bed ALD for Core-Shell Quantum Dots |
| Prof.dr. R.E.I. Schropp |
UU |
10019 |
Impermeable Thin Film Encapsulation for Lighting, Displays and Solar Cells |
| Prof.dr. P.M. Sarro |
TUD |
10026 |
Tailored ALD layer properties for Sensing Applications |
For more information:
Please consult the programme website at www.thinfilmnanomanufacturing.nl.
For more general information, please contact: