Pico-meter resolution capacitive sensor for industrial applications (DET.6907)

Project nummer: det6907

Omschrijving van het onderzoek

The increased transistor density on integrated circuits (IC) and the reduced nanometer dimensions, require more precise positioning in IC production. On its turn, high-accuracy positioning requires closed-loop controlled systems, in which sensor performance is crucial. Any disturbance that cannot be sensed by the sensor will affect the final positioning accuracy. These disturbances include the noise and the drift of the sensor itself. Therefore, sensor noise and drift should be kept at very low level, so that these do not degrade the performance of the closed-loop control system. In general, nano-technology IC production will need a pico-technology sensor system.
The currently used sensor systems cannot fulfil the specifications set for future IC production systems. Only laser interferometers, interferometric optical encoders and capacitive sensors come close in performance to these challenging specifications. Laser interferometers and interferometric optical encoders, however, are costly, complex, power consuming, bulky and require homing to give an absolute value. Commercially available capacitive sensors, on the other hand, have a high thermal drift and a limited dynamic range. Therefore this research project on a low-power, low-drift, high-resolution capacitive sensor is proposed.
The research work will focus on the following items:

A new approach for the sensor design will be used.
A low-power electronic capacitive-sensor interface system will be created.
To achieve a very high stability and a very low drift special electronic signal references will be developed with extreme stability.

Gebruikers

Seven companies are involved in this project.

Projectleider

Dr. S.N. Nihtianov

Technische Universiteit Delft
Elektrotechniek, Wiskunde en Informatica
Vakgr. Elektronica

Postbus 5031
2600 GA Delft

Status van het project

Gestart	: 01-12-2005
Einddatum	: 31-01-2012

Trefwoorden

Capacitieve sensor, Drift, Elektronica, Interface, Nanotechnologie, Positioneren, Sensor, Sensortechnologie, Waferstepper.

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